CMOSET 2011 Microsystems Track Presentation SlidesCMOS Emerging Technologies Research CMOS Emerging Technologies |
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alumina Anemometer anneal cantilever capacitor charge trapping circuit CMOS Emerging Technologies CMOS Oscillators Commercialization Commercialization Conclusions Quartz Conclusions Quartz Replacement devices in control Dielectric Cap dipole dummy gate removal Electrical ENERGY HARVESTERS ferroelectric FETs Fill HK NMOS Floating gate flow freq Frequency Drift Frequency Hz H.N. Alshareef HfO2 HfSiOx SiO2 high aspect ratio high-k dielectrics HK NMOS MG HK Polysilicon MG humidity sensors Hygrometer hysteresis IEEE input interface Ion Sensitive ISFET iTyre Low power Mechanical Memory array Memory devices memristive memristors Metal Fill HK Metal gate MG Metal Fill molding compound NMOS MG Metal Organic Electronics Oscillators Commercialization Conclusions output Oxide Capping Layers package Phase Jitter phase noise pixel PMOS polarization Poly-Si Polyimide Q OUT-OF-PLANE Alfi~%Q Quartz Replacement CMOS read-out Replacement CMOS Oscillators resonance semiconductors temperature thermal budget threshold voltage transistors VLSI XTAL Zigbee