Modern Vacuum PracticeModern Vacuum Practice is an easy-to-understand introduction to high vacuum technology suitable for anyone using high vacuum as a tool. The author provides a fundamentally non-mathematical treatment of the subject, assuming little or no prior vacuum knowledge throughout. With its emphasis always on providing practical information, the book gives the reader the knowledge to set up, use, maintain and troubleshoot a vacuum system. |
Contents
Some relevant physical concepts | 19 |
7 | 28 |
Identification of gases present | 57 |
Copyright | |
11 other sections not shown
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Common terms and phrases
air admittance valve applications argon atmospheric pressure atoms back-migration back-streaming backing pump baffle blades calibration cathode chemical cleaning components compression compressor condense connected contamination cooling cryopanel cryopump diffusion pump elastomer electrical electrons evacuated exhaust filament flange flow foreline trap gas ballast gas load gases gasket gauge head hazard heat helium hydrogen inlet ion pump ionization leak detector leakage liquid nitrogen low pressure lubricant magnetic mass spectrometer materials mbar measurement mechanical booster mercury metal molecular motor normally oil vapour operation outgassing oxygen Pirani Pirani gauge produce pump fluid pump oil pump-down pumping speed pumping system regeneration removed ring rotary pump rotational rotor roughing valve seal semiconductor shown in Figure sorption pumps stage stator surface temperature thermal throughput titanium tracer gas tube turbomolecular pump typically ultimate pressure ultra-high vacuum vacuum chamber vacuum gauge vacuum pumps vacuum system vapour booster vapour pressure volume water vapour