Interferometric Metrology: 20-21 August 1987, San Diego, California

aberrations algorithm aperture Appl applications aspheric aspheric surfaces Atmospheric Compensation beam splitter Bragg cell camera Cosine Error Deadpath detection detector array determined developed displacement distance electronic fiber frequency shift fringe analysis fringe order fringe pattern grating heterodyne HOLOCAM hologram holographic interferometry intensity interference fringes interferogram interferometric testing J. C. Wyant laser diode lens Mark III Interferometer method metrology microns mirror modulation moiré pattern noise null obtained optical components optical fiber optical path optical path length optical system output performance phase difference phase map phase measurement phase objects phase shift phase step pixel plane plate polarization prism processing profilometer real-time reconstruction reference beam reference wave refractive resolution rotating sample schematic sensor shearing interferometer shown in Figure signal slope spherical SPIE subaperture surface profile techniques temperature thermal tilt Twyman-Green Twyman-Green interferometer vibration wavefront wavelength Zygo