Optical Manufacturing and Testing III: 20-23 July, 1999, Denver, Colorado

abrasive accuracy alignment angle aperture aspherical surface astigmatism axis beam beam splitter C/SIC calibration cavity cleanroom coating Colorado July 1999 Conference on Optical configuration depth diameter diamond diffraction Fizeau interferometer flat fluid free-form frequency fringe function fused silica glass grinding interferogram interferometer July 1999 SPIE laser diode lens LIGO machine magnetorheological finishing main laser Manufacturing and Testing material removal measurement method metrology mirror mount National Ignition Facility optical components Optical Manufacturing optical surfaces optical system parameters particles phase shifting pitch pixel polishing position precision radius of curvature reflected refractive index removal rate rotation sample scan sensor shearing shown in Figure slope spatial specifications spherical spherical aberration SPIE SPIE Conference SPIE Vol substrate subsurface damage surface roughness surface shape technique telescope Testing III Denver thermal thickness tool variation vibration wavefront wavelength workpiece Zerodur